Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 2, 2006, Pages

  Nieradko, Łukasz ^a   Gorecki, Christophe ^a   Józwik, Michat ^a   Sabac, Andrei ^a   Hoffmann, Rolf ^b   Bertz, Andreas ^b  

^a FEMTO ST INSTITUTE   (France)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Fiber to waveguide coupling; Integrated optics; Mach Zehnder interferometer; Micro opto electro mechanical systems; Micromirror

Indexed keywords

ELECTRIC FIELDS; INTEGRATED OPTICS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL WAVEGUIDES; SILICA;

FIBER-TO-WAVEGUIDE COUPLING; MACH ZEHNDER INTERFEROMETERS; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS; MICROMIRRORS;

INTERFEROMETERS;

EID: 33748538677     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2203366     Document Type: Article

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