Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a moveable micromirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5346, Issue , 2004, Pages 83-88

  Nieradko, L ^a   Gorecki, C ^a   Sabac, A ^a   Hoffmann, R ^b   Bertz, A ^b  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Fiber optic waveguide coupling; Integrated Optics; Mach Zehnder interferometry; Micromirror; MOEMS

Indexed keywords

CHANNEL CAPACITY; FIBER OPTICS; FINITE ELEMENT METHOD; INTEGRATED OPTICS; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MIRRORS; OPTICAL WAVEGUIDES;

FIBER OPTIC-WAVEGUIDE COUPLINGS; MACH ZEHNDER INTERFEROMETRY; MICROMIRRORS; OPTICAL CHIPS;

INTERFEROMETERS;

EID: 2142849890     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524726     Document Type: Conference Paper

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