An advanced sample structure for large-grain growth by excimer laser crystallization

Journal of the Electrochemical Society

Volumn 153, Issue 10, 2006, Pages

  Hiramatsu, Masato ^a   Ogawa, Hiroyuki ^a   Jyumonji, Masayuki ^a   Katou, Tomoya ^a   Akita, Noritaka ^a   Matsumura, Masakiyo ^a  

^a Advanced LCD Technologies Development Center Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; GRAIN GROWTH; LASERS; PHOTOSENSITIVITY;

IRRADIATED INTENSITY; LASER ANNEALING; LASER CRYSTALLIZATION; LASER LIGHTS;

CRYSTALLIZATION;

EID: 33748431358     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2221865     Document Type: Article

References (10)

1. M. Matsumura, J. Surf. Sci. Soc. Jpn., 21, 278 (2000); (in Japanese).
2. H. J. Kim and J. S. Im, Appl. Phys. Lett., 68, 1513 (1996).
3. M. Tai, M. Hatano, S. Yamaguchi, S. K. Park, T. Noda, M. Hongo, T. Shiba, and M. Ohkura, in Digest of Technical Papers on 9th Imernational Workshop of Active-Matrix Liquid-Crystal Displays (AM-LCD02), p. 231 (2002).
4. A. Hara, F. Takeuchi, M. Takei, K. Yoshino, K. Suga, and N. Sasaki, in Digest of Technical Papers on 8th International Workshop of Active-Matrix Liquid-Crystal Displays (AM-LCD01), p. 227 (2001).
5. Y. Taniguchi, M. Jyumonji, H. Ogawa, M. Hiramatsu, and M. Matsumura, 206th ECS, To be published.
6. T. Katou, H. Ogawa, M. Jyumonji, Y. Taniguchi, N. Akita, M. Hiramatsu, and M. Matsumura, in Digest of Technical Papers on 11th International Workshop of Active-Matrix Liquid-Crystal Displays (AM-LCD04), p. 149 (2004).
7. H. Ogawa, M. Hiramatsu, Y. Kimura, M. Jyumonji, Y. Taniguchi, and M. Matsumura, in Proceedings of the 10th International Display Workshops (IDW03), Fukuoka, p. 323 (2003).
8. W. Yeh and M. Matsumura, Jpn. J. Appl. Phys., Part 1, 41, 1909 (2002).
9. T. Yamane, N. Nagai, S. Katayama, and M. Todoki, J. Appl. Phys., 91, 9772 (2002).
10. M. Hiramatsu, Y. Kimura, M. Jyumonji, M. Nishitani, and M. Matsumura, in Proceedings of CVDXVI and EUROCVD14, p. 701 (2003).