Optimum operating frequency of an atmospheric-pressure dielectric-barrier discharge for the photo-resistor ashing process

Journal of the Korean Physical Society

Volumn 49, Issue 2, 2006, Pages 558-562

  Kim, Gon Ho ^a   Song, Sang Heon ^b  

^a Seoul National University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Atmospheric pressure; Dielectric barrier discharge; PR ashing

Indexed keywords

EID: 33748151320     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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