First results for hyper NA scanner emulation from AIMS™ 45-193i

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6283 I, Issue , 2006, Pages

  Zibold, Axel ^a   Strössner, Ulrich ^a   Rosenkranz, Norbert ^a   Ridley, Andrew ^a   Richter, Rigo ^a   Harnisch, Wolfgang ^a   Williams, Alvina ^b  

^a CARL ZEISS SMT AG   (Germany)

^b SEMATECH   (United States)

Author keywords

Aerial image; AIMS; High NA; Hyper NA; Immersion; Numerical aperture; Polarisation; TE; TM; Vector effects

Indexed keywords

IMAGING SYSTEMS; LIGHT POLARIZATION; MASKS; SCANNING; SEMICONDUCTOR DEVICES;

AERIAL IMAGES; HIGH NA; HYPER NA; IMMERSION LITHOGRAPHY; NUMERICAL APERTURES (NA); VECTOR EFFECTS;

OPTICAL SENSORS;

EID: 33748056826     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.681863     Document Type: Conference Paper

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