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Volumn 117, Issue 2, 2006, Pages 315-322

A novel relative humidity sensor based on microwave resonators and a customized polymeric film

Author keywords

CPW to slotline ring resonator; Customized polyimide; Humidity sensor; Microstrip patch type antenna; Microwave resonator

Indexed keywords

ATMOSPHERIC HUMIDITY; DIELECTRIC MATERIALS; HYSTERESIS; MICROSTRIP ANTENNAS; MICROWAVES; NATURAL FREQUENCIES; PLASTIC FILMS; POLYIMIDES; RADIO WAVES; RESONATORS; SORPTION; WATER; WAVEGUIDES;

EID: 33748042661     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.11.004     Document Type: Article
Times cited : (35)

References (17)
  • 1
    • 0031653009 scopus 로고    scopus 로고
    • Surface micromachined solenoid inductors for high frequency applications
    • Kim Y.-J., and Allen M.G. Surface micromachined solenoid inductors for high frequency applications. IEEE Trans. CPMT 21 (1998) 26-33
    • (1998) IEEE Trans. CPMT , vol.21 , pp. 26-33
    • Kim, Y.-J.1    Allen, M.G.2
  • 5
    • 0033886159 scopus 로고    scopus 로고
    • A high-speed capacitive humidity sensor with on-chip thermal reset
    • Kang U., and Wise K.D. A high-speed capacitive humidity sensor with on-chip thermal reset. IEEE Trans. Elect. Devices 47 4 (2000)
    • (2000) IEEE Trans. Elect. Devices , vol.47 , Issue.4
    • Kang, U.1    Wise, K.D.2
  • 6
    • 0035369453 scopus 로고    scopus 로고
    • A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages
    • Dokmeci M., and Najafi K. A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages. J. MEMS 10 2 (2001) 197-204
    • (2001) J. MEMS , vol.10 , Issue.2 , pp. 197-204
    • Dokmeci, M.1    Najafi, K.2
  • 7
    • 0038514585 scopus 로고    scopus 로고
    • Comparison of three humidity sensors for a pulmonary function diagnosis microsystem
    • Lavile C., and Pellet C. Comparison of three humidity sensors for a pulmonary function diagnosis microsystem. IEEE Sens. J. 2 2 (2002) 96-101
    • (2002) IEEE Sens. J. , vol.2 , Issue.2 , pp. 96-101
    • Lavile, C.1    Pellet, C.2
  • 9
    • 0030350775 scopus 로고    scopus 로고
    • Surface acoustic wave humidity sensor based on the changes in the viscoelastic properties of a polymer film
    • San Atonio, Texas, USA, 3-6 November
    • Cheeke J.D.N., Tashtoush N., and Eddy N. Surface acoustic wave humidity sensor based on the changes in the viscoelastic properties of a polymer film. Proceedings of 1996 IEEE Ultrasonics Symposium. San Atonio, Texas, USA, 3-6 November (1996) 449-452
    • (1996) Proceedings of 1996 IEEE Ultrasonics Symposium , pp. 449-452
    • Cheeke, J.D.N.1    Tashtoush, N.2    Eddy, N.3
  • 10
    • 33748029880 scopus 로고    scopus 로고
    • Y.J. Kim, Application of polymer metal multi-layer processing techniques to microelectromechanical system, Ph.D. thesis, Georgia Institute of Technology, 1997.
  • 11
    • 0347134440 scopus 로고    scopus 로고
    • A compact integrated band-pass filter on a low dielectric constant polyimide dry film
    • Lim O.K., Lee J.I., Kim Y.J., and Park J.Y. A compact integrated band-pass filter on a low dielectric constant polyimide dry film. Microwave Opt. Technol. Lett. 40 (2004) 177-179
    • (2004) Microwave Opt. Technol. Lett. , vol.40 , pp. 177-179
    • Lim, O.K.1    Lee, J.I.2    Kim, Y.J.3    Park, J.Y.4
  • 12
    • 17744396699 scopus 로고    scopus 로고
    • Fabrication and evaluation of a flexible sieve-type microelectrode array for monitoring the regenerating state of peripheral nerves
    • Kim Y.H., Lee C.K., Kim Y.J., and Lee M. Fabrication and evaluation of a flexible sieve-type microelectrode array for monitoring the regenerating state of peripheral nerves. Sens. Mater. 17 (2005) 139-153
    • (2005) Sens. Mater. , vol.17 , pp. 139-153
    • Kim, Y.H.1    Lee, C.K.2    Kim, Y.J.3    Lee, M.4
  • 13
    • 0035247798 scopus 로고    scopus 로고
    • Low dielectric constant polymers for microelectronics
    • Maier G. Low dielectric constant polymers for microelectronics. Prog. Polym. Sci. 26 (2001) 3-65
    • (2001) Prog. Polym. Sci. , vol.26 , pp. 3-65
    • Maier, G.1
  • 15
    • 0032095339 scopus 로고    scopus 로고
    • Effects of precursor origins on water sorption behaviors of various aromatic polyimides in thin films
    • Han H., Chung H., Gryte C.C., Shin T.J., and Ree M. Effects of precursor origins on water sorption behaviors of various aromatic polyimides in thin films. Polymer 39 13 (1998) 2963-2972
    • (1998) Polymer , vol.39 , Issue.13 , pp. 2963-2972
    • Han, H.1    Chung, H.2    Gryte, C.C.3    Shin, T.J.4    Ree, M.5
  • 17
    • 84939728343 scopus 로고
    • Analysis of a microstrip covered with a lossy dielectric
    • Bahl I.J., and Stuchly S.S. Analysis of a microstrip covered with a lossy dielectric. IEEE Trans. Microw. Theo. Tech. 28 2 (1980) 104-109
    • (1980) IEEE Trans. Microw. Theo. Tech. , vol.28 , Issue.2 , pp. 104-109
    • Bahl, I.J.1    Stuchly, S.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.