Improvement of micromachined SnO2 gas sensors selectivity by optimised dynamic temperature operating mode

Sensors and Actuators, B: Chemical

Volumn 118, Issue 1-2, 2006, Pages 276-282

  Parret, F ^a   Menini Ph ^a   Martinez, A ^a   Soulantica, K ^b   Maisonnat, A ^b   Chaudret, B ^b  

^a LAAS CNRS   (France)

^b LCC LABORATOIRE DE CHIMIE DE COORDINATION   (France)

Author keywords

Discriminant variables; Micromachined gas sensor; Temperature cycling

Indexed keywords

CONCENTRATION (PROCESS); GAS DETECTORS; MICROMACHINING; OPTIMIZATION; TEMPERATURE DISTRIBUTION; TIN COMPOUNDS;

DISCRIMINANT VARIABLES; MICROMACHINED GAS SENSOR; TEMPERATURE CYCLING;

CHEMICAL SENSORS;

EID: 33747852629     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.055     Document Type: Article

References (18)

1. Suehle J.S., Cavicchi R.E., Gaitan R., and Semancik S. Tin oxide gas sensor fabricated using CMOS micro-hotplate and in situ processing. IEEE Electron Device Lett. 14 3 (1993) 118-120
2. Guidi V., Dori L., Faglia G., Ferroni M., Martinelli G., Nelli P., and Sberveglieri G. Thin-film gas sensor implemented on a low-power-comsumption micromachined silicon structure. Sens. Actuators B 49 1-2 (1998) 88-92
3. T. Viard, Traitement du signal appliqué aux capteurs chimiques. Amélioration des performances: precision, sélectivité, fiabilité, Ph.D. Thesis, LAAS Report No. 99554, 1999.
4. Cavicchi R.E., Kreider K.G., Gaitan M., and Chaparala P. Optimised temperature-pulse sequences for the enhancement of chemically specific patterns from micro-hotplate gas sensors. Sens. Actuators B 33 1-3 (1996) 142-146
5. 2 gas sensors in temperature-pulsed operation mode. Sens. Actuators B 57 1-3 (1999) 130-134
6. 2 gas sensors. Sens. Actuators B 65 (2000) 91-93
7. 2 gas sensor. Eurosensors XVI. Prague (2003) 873-875
8. M. Baumbach, et al., New micromachined gas sensor combined with intelligent signal processing allowing fast gas identification after power-up, in: 12th Sensor Conference, 10-12 May 2005, Nuremberg, Germany, B.7.2, in proc. Vol II.
9. S. Astie, Intégration d'un capteur de gaz à oxide semi-conducteur sur silicium, Ph.D. Thesis, LAAS Report No. 98537, 1998.
10. P. Fau, M. Sauvan, S. Trautweiler, C. Nayral, L. Erades, A. Maisonnat, B. Chaudret, Nanosized tin particles as precursors for gas sensor application, European patent no. 98400246.9-2104.
11. A. Maisonat, H. Delprat, M. Baumbach, A. Schültze, F. Cheng, S. Kelly, F. Parret, P. Ménini, K. Soulantica, B. Chaudret, New generation of micro machined silicon gas sensors: nano-structured Pd- and Pt-doped tin dioxide sensitive layers for the detection of hazardous gases, in: Proceeding Eurosensors XVIII, Rome, September 12-15, 2004.
12. Nayral C., Viala E., Fau P., Senocq F., Jumas J.C., Maisonnat A., and Chaudret B. Synthesis of tin and tin oxide nanoparticles of low size dispersity for application in gas sensing. Chem. Eur. J. 6 22 (2000) 4082-4090
13. L. Erades, Nanoparticules d'oxydes semi-conducteurs: synthèse, caractérisation et application à la detection selective de gaz, Ph.D. Thesis, LCC Report.
14. x nanomaterial. J. Phys. Chem. B 108 (2004) 8876-8887
15. 2 detection with low cross-sensitivity to CO: sol-gel preparation, film preparation, powder calcination, doping and grinding. Sens. Actuators B 65 1-3 (2000) 166-168
16. Sberveglieri G. Recent developments in semiconducting thin-film gas sensors. Sens. Actuators B 23 (1995) 103-109
17. 2. Sens. Actuators B 21 (1994) 91-96
18. 2-x thin film with added Pt fabricated by the dipping method. Sens. Actuators B 20 (1989) 301-305