Electrodeposited 80Ni-20Fe (Permalloy) as a structural material for high aspect ratio microfabrication

Materials Science and Engineering: A

Volumn 432, Issue 1-2, 2006, Pages 149-157

  Buchheit, T E ^a   Goods, S H ^b   Kotula, P G ^a   Hlava, P F ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Electrodeposition; LIGA; Ni Fe alloys; Sulfur embrittlement

Indexed keywords

ASPECT RATIO; BUILDING MATERIALS; CRYSTAL MICROSTRUCTURE; CRYSTALLOGRAPHY; ELECTRODEPOSITION; EMBRITTLEMENT; FABRICATION; GRAIN BOUNDARIES; HEAT TREATMENT; MICROSTRUCTURE; TEXTURES; WETTING;

COMPOSITIONAL MODULATION; CRYSTALLOGRAPHIC TEXTURE; MICROFABRICATION; PERMALLOY;

NICKEL ALLOYS;

ASPECT RATIO; BUILDING MATERIALS; CRYSTAL MICROSTRUCTURE; CRYSTALLOGRAPHY; ELECTRODEPOSITION; EMBRITTLEMENT; FABRICATION; GRAIN BOUNDARIES; HEAT TREATMENT; MICROSTRUCTURE; NICKEL ALLOYS; TEXTURES; WETTING;

EID: 33747801693     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2006.05.149     Document Type: Article

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