Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node

Microelectronics Reliability

Volumn 46, Issue 9-11, 2006, Pages 1498-1503

  Schlangen, R ^a   Sadewater, P ^a   Kerst, U ^a   Boit, C ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE NETWORKS; INTEGRATED CIRCUITS; SILICON COMPOUNDS;

CIRCUIT NODE; SILICIDE;

ELECTRIC NETWORK ANALYSIS;

EID: 33747786680     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.07.025     Document Type: Article

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6. st ISTFA (2005) 8