Dopant imaging on front surface of silicon devices with a coaxial photon-ion column

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2005, Issue , 2005, Pages 8-13

  Pajak, Robert ^a   Baiocchi, Frank ^a   Roy, Erwan Le ^b  

^a AGERE SYSTEMS   (United States)

^b Credence Systems Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL DELINEATION; DOPANT CONTRAST ENHANCEMENT; OXIDE DEPOSITION;

CONTRAST MEDIA; INTERFACES (MATERIALS); ION BEAMS; PHOTONS;

IMAGING TECHNIQUES;

EID: 33645680606     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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