Influence of effective pumping speed on oxygen atom density in a plasma post-glow reactor

Vacuum

Volumn 80, Issue 8, 2006, Pages 904-907

  Cvelbar, Uroš ^a   Mozetič, Miran ^a   Babič, Dušan ^b   Poberaj, Igor ^b   Ricard, Andre ^c  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Atomic oxygen; Catalytic probe; Microwave plasma; Plasma diagnostics

Indexed keywords

ARGON; CHEMICAL REACTORS; ELECTRIC DISCHARGES; MICROWAVES; OPTICAL PUMPING; PLASMA DIAGNOSTICS;

ATOMIC OXYGEN; CATALYTIC PROBE; MICROWAVE PLASMA;

OXYGEN;

EID: 33747418492     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.073     Document Type: Article

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