Patterning of highly oriented pyrolytic graphite by oxygen plasma etching

Applied Physics Letters

Volumn 75, Issue 2, 1999, Pages 193-195

  Lu, Xuekun ^a   Huang, Hui ^a   Nemchuk, Nikolay ^a   Ruoff, Rodney S ^a  

^a WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000313543     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124316     Document Type: Article

References (16)

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