Electrostatically actuated metal-droplet microswitches integrated on CMOS chip

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 879-889

  Shen, Wenjiang ^a,b   Edwards, R Timothy ^c   Kim, Chang Jin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Innovative Micro Technology   (United States)

^c JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

Droplet microswitch; Electrostatic actuation; Liquid metal droplet; Mercury microswitch; Microswitch; Surface tension

Indexed keywords

ELECTROSTATIC ACTUATORS; MICROELECTRONICS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE TENSION; SURFACE TREATMENT; SWITCHES;

DROPLET MICROSWITCH; LIQUID-METAL DROPLET; MERCURY MICROSWITCH;

CMOS INTEGRATED CIRCUITS;

EID: 33747416746     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.878877     Document Type: Article

References (21)

1. K. Petersen, "Silicon as a mechanical material," Proc. IEEE, vol. 70, pp. 420-457, May 1982.
2. M. A. Grétillat, P. Thiébaud, N. F. d. Rooij, and C. Linder, "Electrostatic polysilicon microrelays integrated with MOSFETs," presented at the IEEE MEMS Workshop, Oiso, Japan, Jan. 1994, unpublished.
3. J. Drake, H. Jerman, B. Lutze, and M. Stuber, "An electrostatically actuated micro-relay," presented at the The 8th Int. Conf. on Solid-State Sensors and Actuators, Stockholm, Sweden, Jun. 1995, unpublished.
4. W. Taylor, M. Allen, and C. Dauwalter, "A fully integrated magnetically actuated micromachined relay," presented at the Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, Jun. 1996, unpublished.
5. J. Qui, J. H. Lang, A. H. Slocum, and R. Strumpler, "A high-current electrothermal bistable MEMS relay," presented at the IEEE Conf. MEMS, Kyoto, Japan, Jan. 2003, unpublished.
6. M. J. S. Smith, Application-Specific Integrated Circuits. Reading, MA: Addison-Wesley, June 1997.
7. J. Simon, S. Saffer, and C.-J. Kim, "A micromechanical relay with a thermally-driven mercury micro-drop," presented at the IEEE MEMS Workshop' 96, San Diego, CA, Feb. 1996, unpublished.
8. J. Simon, S. Saffer, and C.-J. Kim, "A liquid-filled microrelay with a moving mercury micro-drop," J. Microelectromech. Syst., vol. 6, pp. 208-216, Sep. 1997, unpublished.
9. J. Simon, S. Saffer, F. Sherman, and C.-J. Kim, "Lateral polysilicon microrelays with a mercury micro-drop contact," IEEE Trans. Ind. Electron., vol. 45, pp. 854-860, 1998.
10. J. Kim, W. Shen, L. Latorre, and C.-J. Kim, "A micromechanical switch with electrostatically driven liquid-metal droplet," Sens. Actuators A, Phys., vol. 97-98, pp. 672-679, 2002.
11. W. Shen, R. T. Edwards, and C.-J. Kim, "Mercury droplet microswitch for re-configurable circuit interconnect," presented at the IEEE Transducers '03 Conf., Boston, Mass., June 2003, unpublished.
12. T. D. Truong, "Selective deposition of micro scale liquid gallium alloy droplets," in Mechanical and Aerospace Engineering. Los Angeles: UCLA, 2000.
13. J. Simon, "A liquid filled microrelay with a moving mercury microdrop," in Mechanical and Aerospace Engineering Department. Los Angeles: University of California, Los Angeles, 1997.
14. A. R. v. Hippel, Molecular Science and Molecular Engineering. New York: Wiley, 1959.
15. J. Kim, W. Shen, L. Latorre, and C.-J. Kim, "A micromechanical switch with electrostatically driven liquid-metal droplet," presented at the The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, 2001, unpublished.
16. W. Shen, J. Kim, and C.-J. Kim, "Controlling the adhesion force by physical surface modification for electrostatic actuation of microscale mercury drop," presented at the IEEE Conf. MEMS, Las Vegas, NV, Jan. 2002, unpublished.
17. J. Kim and C.-J. Kim, "Nanostructured surfaces for dramatic reduction of flow resistance in droplet-based microfluidics," presented at the IEEE Conf. MEMS, Las Vegas, NV, Jan. 2002, unpublished.
18. W. Shen, J. Kim, and C.-J. Kim, "Resistance of liquid-metal droplets against actuation on microstructured surfaces," presented at the Int. Mechanical Engineering Congress and Exposition (IMECE2001), New York, NY, Nov. 2001, unpublished.
19. L. Latorre, J. Kim, J. Lee, P.-P. d. Guzman, H. J. Lee, P. Nouet, and C.-J. Kim, "Electrostatic actuation of microscale liquid-metal droplets," J. Microelectromech. Syst., vol. 11, pp. 302-308, Aug. 2002.
20. H. Shimizu and S. Ishiwar, "High resolution tracing method aiming at monitoring metal contaminants in silicon device manufacturing processes," presented at the SPIE Conference on In-Line Methods and Monitors for Process and Yield Improvement, Santa Clara, CA, Sep. 1999, unpublished.
21. N. Adam, The Physics and Chemistry of Surfaces. London, U.K.: Oxford University Press, 1941.