N2O reactive gas effect on rf magnetron sputtered Pb(Zr0.52Ti0.48)O3 thin films

Journal of Applied Physics

Volumn 86, Issue 12, 1999, Pages 7024-7028

  Kim, Tae Song ^a   Kim, Dong Joo ^a   Hyung, Jin Jung ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043047854     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371789     Document Type: Article

References (19)

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