Probing thin over layers with variable energy/cluster ion beams

Applied Surface Science

Volumn 252, Issue 19, 2006, Pages 6517-6520

  Spool, A ^a   White, R ^a  

^a SAN JOSE RESEARCH CENTER   (United States)

Author keywords

Cluster ion depth profiling; Magnetic recording disks; Static SIMS; ToF SIMS

Indexed keywords

MAGNETIC RECORDING; MASS SPECTROMETRY; MOLECULAR DYNAMICS; ORGANIC ION EXCHANGERS; THICK FILMS;

CLUSTER ION DEPTH PROFILING; MAGNETIC RECORDING DISKS; STATIC SIMS; TOF-SIMS;

ION BEAMS;

EID: 33747194139     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.219     Document Type: Article

References (10)

1. Gilmore I.S., Seah M.P., and Johnstone J.E. In: Benninghoven A., Bertrand P., Migeon H.-N., and Werner H.W. (Eds). Proceedings of the 12th International Conference on SIMS. Elsevier, Brussels (2000) 801
2. Briggs D., and Hearn M.J. Vacuum 36 (1986) 1005
3. Bryan S.R., Belu A.M., Hoshi T., and Oiwa R. Appl. Surf. Sci. 231-232 (2004) 201
4. Bolbach G., Viari A., Galera R., Brunot A., and Blais J.C. Int. J. Mass Spectrom. Ion Processes 112 (1992) 93
5. Hoshi T., Yoshida S., Watanabe T., Ichnohe Y., and Kudo M. Appl. Surf. Sci. 142 (1999) 614
6. Gao Y. J. Appl. Phys. 64 (1988) 3760
7. Wittmaack K. Nucl. Instrum. Methods B 64 (1992) 621
8. Tomita M., Homma Y., and Inaba M. Anal. Sci. 7 (1991) 447
9. Lipisky D., Gede R., Ganshow O., and Benninghoven A. J. Vac. Sci. Technol. A3 (1985) 2007
10. Spool A.M. Surf. Interface Anal. 36 (2004) 264