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Volumn 252, Issue 19, 2006, Pages 7228-7231

SIMS quantification of matrix and impurity species in Al x Ga 1-x N

Author keywords

Aluminum Gallium Nitride (AlGaN); Calibration curve; Quantification; SIMS

Indexed keywords

ALUMINUM NITRIDE; CHARACTERIZATION; IMPURITIES; OPTOELECTRONIC DEVICES; SECONDARY ION MASS SPECTROMETRY; SPUTTERING;

ALUMINUM GALLIUM NITRIDE (ALGAN); CALIBRATION CURVE; IMPURITY CONTROL; QUANTIFICATION;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 33747193839 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2006.02.148 Document Type: Article

Times cited : (16)

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