Study of carbon films on silicon substrates

Materials Science Forum

Volumn 482, Issue , 2005, Pages 203-206

  Jasek O ^a   Elias M ^a   Frgala, Z ^a   Matejkova J ^b   Rek, A ^b   Kadlecikova M ^c  

^a MASARYK UNIVERSITY   (Czech Republic)

^b INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^c SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

Carbon nanostructures; Diamond; High resolution scanning microscopy; Nanotubes

Indexed keywords

CARBON NANOTUBES; DIAMOND FILMS; FILM GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; NANOCRYSTALLINE MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES;

CARBON NANOSTRUCTURES; NANOTUBE FILMS; RADIOFREQUENCY PLASMA CHEMICAL VAPOR DEPOSITION;

CARBON FILMS;

EID: 33747097111     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-964-4.203     Document Type: Conference Paper

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