Raman bands in microwave plasma assisted chemical vapour deposited films

Microelectronics Journal

Volumn 34, Issue 11, 2003, Pages 1075-1077

  Kadlecikova M ^a   Breza, J ^a   Vesely M ^a   Frgala, Z ^b   Kudrle, V ^b   Janca J ^b   Janik J ^a   Bursik J ^c  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^b MASARYK UNIVERSITY   (Czech Republic)

^c INSTITUTE OF PHYSICS OF MATERIALS   (Czech Republic)

Author keywords

Diamond; Microwave plasma assisted chemical vapour deposition; Raman spectroscopy

Indexed keywords

MICROWAVE PLASMA;

CHEMICAL VAPOR DEPOSITION; METHANE; MICROWAVES; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

DIAMOND FILMS;

EID: 0142154022     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2003.09.002     Document Type: Article

References (6)

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