Average flow model with elastic deformation for CMP

Tribology International

Volumn 39, Issue 11, 2006, Pages 1388-1394

  Kim, Tae Wan ^a   Cho, Yong Joo ^a  

^a Pusan National University   (South Korea)

Author keywords

CMP; Elastic deformation; Flow factor

Indexed keywords

BOUNDARY CONDITIONS; DEFORMATION; ELASTICITY; FLOW OF FLUIDS; REYNOLDS NUMBER; SURFACE ROUGHNESS; THICKNESS CONTROL;

CHEMICAL MECHANICAL PLANARIZATION (CMP); ELASTIC DEFORMATION; FLOW FACTOR; FLOW MODEL;

PLANERS;

EID: 33747081365     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.triboint.2005.12.002     Document Type: Article

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