Micromachining of assembled liquid crystal displays

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 215, Issue 11, 2001, Pages 1625-1631

  Yeo, S H ^a   Tan, E C ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Femtosecond laser; LCD; Micromachining

Indexed keywords

EID: 33746938698     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/0954405011519385     Document Type: Article

References (14)

1. Tran, V. Application of a xenon laser in microelectronics and liquid crystal displays. Florod Corporation, California, 1999 (personal documents).
2. Yoshimura, R., Ogawa, N., Iwamoto, T. and Mouri, T. Studies on characteristics of ITO target materials 2. TOSOH SMD Technical Note TKN 2.003A, Japan, 1992.
3. Schaeffer, R. D. Laser-manufactured features in medical catheters and angioplasty. In Medical Device and Diagnostic Industry Magazine (MDDI), November 1996, p. 61.
4. DeGamo, T. L. Handbook of Laser Micromachining, 1999 (Clark-MRX, Inc., Michigan).
5. Waters, R. L. and Pothoven, F. R. Laser repair of flat panel displays. In Rapid Thermal and Laser Processing, Proceedings of SPIE, 1992, Vol. 1804, pp. 161-165 (The International Society for Optical Engineering).
6. Liu, X., Du, D. and Mourou, G. Laser ablation and micromachining with ultrashort laser pulses. IEEE J. Quantum Electronics, 1997, 33, 1706-1716.
7. Banks, P. S., Stuart, B. C., Komasho, A. M., Feit, M. D., Rubenschik, A. M. and Perry, M. D. Femtosecond laser materials processing. In Proceedings of SPIE, 2000, Vol. 3934, pp. 14-21 (The International Society for Optical Engineering).
8. Kim, T., Kim, H. S., Hetterich, M., Jones, D., Girkin, J. M., Bente, E. and Dawson, M. D. Femtosecond laser machining of gallium nitride. Mater. Sci. Engng B, 2001, 82(1-3), 262-264.
9. Mourou, G. Method for controlling configuration of laser induced breakdown and ablation. US Pat. 5656186, 1997.
10. Carsten, M., Boris, N. C., Stefan, N., Ferdinand, A., Andreas, T., Herbert, W. and Bernd, W. Short-pulse laser ablation of solid targets. Optics Communications, 1996, 129, 134-142.
11. Corkum, P. B. Femtosecond lasers and their implications for materials processing. In Proceedings of SPIE, 1998, Vol. 3274, pp. 10-17 (The International Society for Optical Engineering).
12. Pronko, P. P., Dutta, S. K., Squier, J., Rudd, J. V., Du, D. and Mourou, G. Machining of sub-micron holes using a femtosecond laser at 800 nm. Optics Communications, 1995, 114, 106-110.
13. Stuart, B. C., Feit, M. D., Rubenchik, A. M., Shore, B. W. and Perry, M. D. Laser-induced damage in dielectrics with nanosecond to sub-picosecond pulses. Phys. Rev. Lett., 1995, 74, 2248-2251.
14. Toenshoff, H. K., Ostendorf, A., Nolte, S., Korte, F. and Bauer, T. Micro-machining using femtosecond lasers. In Proceedings of SPIE, 2000, Vol. 4088, pp. 136-139 (The International Society for Optical Engineering).