A systematic approach to fabricate CNT-based nano devices: Combining DEP and microspotting technologies

2005 5th IEEE Conference on Nanotechnology

Volumn 1, Issue , 2005, Pages 350-353

  Lai, King W C ^a   Fung, Carmen K M ^a   Li, Wen J ^a,b,c  

^a Centre for Micro and Nano Systems   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^c INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

CNT sensors; DEP manipulation; Micro robotic spotting; Nano batch fabrication; Nano manufacturing

Indexed keywords

ELECTROPHORESIS; MICROELECTRODES; NANOSTRUCTURED MATERIALS; SENSORS;

CNT SENSORS; COMBINING DIELECTROPHORETIC (DEP); MICRO-ROBOTIC SPOTTING; NANO BATCH FABRICATION; NANO MANUFACTURING;

CARBON NANOTUBES;

EID: 33746936700     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2005.1500768     Document Type: Conference Paper

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