SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 9, 2006, Pages 1223-1227

A study of hard diamond-like carbon films in mid-frequency dual-magnetron sputtering

Author keywords

Cr doped DLC film; Mid frequency dual magnetron sputtering; Multilayered and graded structure; Properties

Indexed keywords

ARGON; CRYSTAL GROWTH; CUTTING TOOLS; ELECTRIC POTENTIAL; MAGNETRON SPUTTERING; MICROSTRUCTURE; PROTECTIVE ATMOSPHERES;

CR-DOPED DLC FILM; MID-FREQUENCY DUAL-MAGNETRON SPUTTERING; MULTILAYERED AND GRADED STRUCTURE;

DIAMONDS;

EID: 33746732245 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.09.040 Document Type: Article

Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.