Fabrication of fully released aluminum nitride nanoresonators

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2, Issue , 2003, Pages 778-780

  Currano, L J ^a   Wickenden, A E ^a   Dubey, M ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Aluminum nitride; Capacitive sensors; Electrodes; Filtering; Lithography; Optical device fabrication; Optical resonators; Piezoelectric devices; Platinum; Resonator filters

Indexed keywords

ALUMINUM; CAPACITIVE SENSORS; ELECTRODES; FABRICATION; FILTRATION; LITHOGRAPHY; MICROWAVE FILTERS; NANOSENSORS; NANOTECHNOLOGY; NITRIDES; OPTICAL RESONATORS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; PLATINUM; RESONATORS; SILICON OXIDES;

ALUMINUM NITRIDE (ALN); CLAMPED-CLAMPED BEAM; ELECTRICAL ISOLATION; OPTICAL DEVICE FABRICATION; PLATINUM BOTTOM ELECTRODES; RESONATOR FILTERS; SILICON SUBSTRATES; STRUCTURAL LAYERS;

ALUMINUM NITRIDE;

EID: 33746662676     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2003.1231029     Document Type: Conference Paper

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