Characterization of micromachined silicon rectangular waveguide at 400 GHz

IEEE Microwave and Wireless Components Letters

Volumn 16, Issue 6, 2006, Pages 366-368

  Kirby, P L ^a   Pukala, D ^b   Manohara, H ^b   Mehdi, I ^b   Papapolymerou, J ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Laser micromachining; Micromachining; Silicon waveguide; Submillimeter; Terahertz (THz)

Indexed keywords

MICROMACHINING; SILICON; SUBMILLIMETER WAVES;

LASER MICROMACHINING; SILICON WAVEGUIDES; SUBMILLIMETER; TERAHERTZ (THZ);

RECTANGULAR WAVEGUIDES;

EID: 33746598304     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2006.875593     Document Type: Article

References (8)

1. W. H. Chow, A. Champion, and D. P. Steenson, "Measurements to 320 GHz of millimetre-wave waveguide components made by high precision and economic micro-machining techniques," in Proc. High Freq. Postgraduate Student Colloq., Sep. 8-9, 2003, pp. 90-93.
2. K. Hui, J. Hesler, D. Kurtz, W. Bishop, and T. Crowe, "A micromachined 585 GHz Schottky mixer," IEEE Microw. Guided Wave Lett., vol. 10, no. 9, pp. 374-376, Sep. 2000.
3. W. R. McGrath, C. Walker, M. Yap, and Y. Tai, "Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies," IEEE Microw. Guided Wave Lett., vol. 3, no. 3, pp. 61-63, Mar. 1993.
4. J. P. Becker, J. R. East, and L. P. B. Katehi, "Performance of silicon micromachined waveguide at W-band," Electron. Lett., vol. 38, no. 13, pp. 638-639, Jun. 20, 2002.
5. C. K. Walker, G. Narayanan, H. Knoepfle, J. Capara, J. Glenn, and A. Hungerford, "Laser micromachining of silicon: a new technique for fabricating high quality terahertz waveguide components," in Proc. 8th Int. Symp. Space Terahertz Technol., Mar. 1997, pp. 358-376.
6. V. Lubecke, K. Mizuno, and G. M. Rebeiz, "Micromachining for Terahertz application," IEEE Trans. Microw. Theory Tech., vol. 46, no. 11, pp. 1821-1831, Nov. 1998.
7. P. L. Kirby, D. Pukala, H. Manohara, I. Mehdi, and J. Papapolymerou, "A micromachined 400 GHz rectangular waveguide and 3-pole bandpass filter on a silicon substrate," in IEEE MTT-S Int. Dig., Jun. 2004, pp. 1185-1188.
8. G. A. Ediss, "Measurements and simulations of overmoded waveguide components at 70-118 GHz, 220-330 GHz and 610-720 GHz," in Proc. Int. Symp. Space Terahertz Technol., Tucson, AZ, Apr. 2003, [CD ROM].