Performance of silicon micromachined waveguide at W-band

Electronics Letters

Volumn 38, Issue 13, 2002, Pages 638-639

  Becker, J P ^a   East, J R ^a   Katehi, L P B ^a  

^a MONTANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA ACCESSORIES; ATTENUATION; HORN ANTENNAS; MICROMACHINING; MILLIMETER WAVE DEVICES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

SILICON WAVEGUIDES; SUBMILLIMETER WAVE SYSTEMS; WET ANISOTROPIC ETCHING;

WAVEGUIDES;

EID: 0037142497     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20020457     Document Type: Article

References (4)

1. Silicon micromachined waveguides for millimeter-wave and submillimeter-wave and submillimeter-wave frequencies
2. A new micro-machined millimeter-wave and terahertz snap together rectangular waveguide technology
3. Etched-silicon micromachined W-band waveguides and horn antennas
4. A finite ground coplanar line-to-silicon micromachined waveguide transition