Formation of convex shaped poly(phenylsilsesquioxane) micropatterns on indium tin oxide substrates with hydrophobic-hydrophilic patterns using the electrophoretic sol-gel deposition method

Journal of Materials Research

Volumn 21, Issue 5, 2006, Pages 1255-1260

  Takahashi, Kenji ^a   Tadanaga, Kiyoharu ^a   Matsuda, Atsunori ^b   Hayashi, Akitoshi ^a   Tatsumisago, Masahiro ^a  

^a Osaka Prefecture University   (Japan)

^b TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROPHORESIS; HEAT TREATMENT; HYDROPHILICITY; HYDROPHOBICITY; MORPHOLOGY; SOL-GELS;

ELECTROPHORETIC DEPOSITION METHOD; INDIUM TIN OXIDE SUBSTRATES; POLY(PHENYLSILSESQUIOXANE); SOL-GEL DEPOSITION METHOD;

SUBSTRATES;

EID: 33746512151     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0150     Document Type: Article

References (25)

1. Y. Xia and G.M. Whitesides: Soft lithography. Angew. Chem. Int. Ed. Engl. 37(5), 550 (1998).
2. N. Tohge, A. Matsuda, T. Minami, Y. Matsuno, S. Katayama, and Y. Ikeda: Fine-patterning on glass substrates by the sol-gel method. J. Non-Cryst. Solids 100(1-3), 501 (1988).
3. A. Matsuda, Y. Matsuno, Y. Mitsuhashi, N. Tohge, and T. Minami: Optical disk substrate fabricated by the sol-gel method. Key Eng. Mater. 150, 111 (1998).
4. A. Matsuda, Y. Matsuno, M. Tatsumisago, and T. Minami: Fine patterning and characterization of gel films derived from methyl-triethoxysilane and tetraethoxysilane. J. Am. Ceram. Soc. 81(11), 2849 (1998).
5. A. Matsuda, T. Sasaki, M. Tatsumisago, and T. Minami: Micropatterning on methylsilsesquioxane-phenylsilsesquioxane thick films by the sol-gel method. J. Am Ceram. Soc. 83(12), 3211 (2000).
6. N. Tohge, K. Shinmou, and T. Minami: Effects of UV-irradiation on the formation of oxide thin films from chemically modified metal-alkoxides. J. Sol-Gel Sci. Tech. 2(1-3), 581 (1994).
7. 3 gel films. Jpn. J. Appl. Phys. 37(4A), 1842 (1998).
8. A.H.O. Karkkainen, J.M. Tamkin, J.D. Rogers, D.R. Neal, O.E. Hormi, G.E. Jabbour, J.T. Rantala, and M.R. Descour: Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication. Appl. Opt. 41, 3988 (2002).
9. K. Kishida, M. Tatsumisago, and T. Minami: Preparation of thick silica films by combined sol-gel and electrophoretic deposition methods. J. Ceram. Soc. Jpn. 102, 336 (1994).
10. H. Nishimori, M. Tatsumisago, and T. Minami: Preparation of thick silica films by the electrophoretic sol-gel deposition on a stainless steel sheet. J. Ceram. Soc. Jpn. 103, 78 (1995).
11. H. Nishimori, M. Tatsumisago, and T. Minami: Dispersity and size of silica particles constructing thick films prepared by electrophoretic sol-gel deposition. J. Ceram. Soc. Jpn. 103, 743 (1995).
12. H. Nishimori, M. Tatsumisago, and T. Minami: Influence of size of dispersed silica particles on preparation of thick silica films by using electrophoretic sol-gel deposition. Bull. Chem. Soc. Jpn. 69, 815 (1996).
13. R. Sakamoto, H. Nishimori, M. Tatsumisago, and T. Minami: Preparation of titania thick films by electrophoretic sol-gel deposition using hydrothermally treated particles. J. Ceram. Soc. Jpn. 106, 1034 (1998).
14. A. Matsuda, T. Sasaki, K. Hasegawa, M. Tatsumisago, and T. Minami: Thermal softening behavior of poly(phenylsilsesquioxane) and poly(benzylsilsesquioxane) particles. J. Ceram. Soc. Jpn. 108, 830 (2000).
15. K. Katagiri, K. Hasegawa, A. Matsuda, M. Tatsumisago, and T. Minami: Preparation of transparent thick films by electrophoretic sol-gel deposition using phenyltriethoxysilane-derived particles. J. Am. Ceram. Soc. 81, 2501 (1998).
16. A. Matsuda, T. Sasaki, K. Hasegawa, M. Tatsumisago, and T. Minami: Thermal softening behavior and application to transparent thick films of poly(benzylsilsesquioxane) particles prepared by the sol-gel process. J. Am. Ceram. Soc. 84, 775 (2001).
17. S.J. Limmer, S. Seraji, Y. Wu, T.P. Chou, C. Nguyen, and G.Z. Cao: Template-based growth of various oxide nanorods by sol-gel electrophoresis. Adv. Funct. Mater. 12, 59 (2002).
18. S.J. Limmer and G.Z. Cao: Sol-gel electrophoretic deposition for the growth of oxide nanorods. Adv. Mater. 15, 427 (2003).
19. Y. Sakurai, S. Okuda, H. Nishiguchi, N. Nagayama, and M. Yokoyama: Microlens array fabrication based on polymer electrodeposition. J. Mater. Chem. 13, 1862 (2003).
20. Y. Masuda, T. Sugiyama, H. Lin, W.S. Seo, and K. Koumoto: Selective deposition and micropatterning of titanium dioxide thin film on self-assembled monolayers. Thin Solid Films 382(1-2), 153 (2001).
21. 2 ultrathin film selectively deposited on a patterned self-assembled monolayer. Langmuir 18, 10379 (2002).
22. K. Tadanaga, J. Morinaga, T. Fujii, A. Matsuda, and T. Minami: Formation of convexly shaped silica micropatterns on sol-gel derived films using a difference in surface free energy. Glass Technol. 43C, 275 (2002).
23. 2 thin films using hydrophobic-hydrophilic patterned surface. Ceram. Int. 30, 1815 (2004).
24. D.M. Hartmann, O. Kibar, and S.C. Esener: Optimization and theoretical modeling of polymer microlens arrays fabricated with the hydrophobic effect. Appl. Opt. 40, 2736 (2001).
25. K. Tadanaga, J. Morinaga, A. Matsuda, and T. Minami: Superhydrophobic-superhydrophilic micropatterning on flower-like alumina coating film by the sol-gel method. Chem. Mater. 12, 590 (2000).