Thermal contributions to the bending of bimaterial cantilever sensors

Applied Physics Letters

Volumn 89, Issue 3, 2006, Pages

  Zhao, Jun ^a   Berger, Rüdiger ^a   Gutmann, Jochen S ^b  

^a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

^b JOHANNES GUTENBERG UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; POLYMERS; POLYSTYRENES; SILICON; SURFACE TENSION; THERMAL EXPANSION;

MICROMECHANICAL CANTILEVERS; POLYSTYRENE COATING; SURFACE POTENTIAL; TEMPERATURE COEFFICIENT;

SENSORS;

EID: 33746283635     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2222346     Document Type: Article

References (24)

1. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, Rev. Sci. Instram. 75, 2229 (2004).
2. G. Y. Chen, T. Thundat, E. A. Wachter, and R. J. Warmack, J. Appl. Phys. 77, 3618 (1995).
3. P. A. Rasmussen, J. Thaysen, O. Hansen, S. C. Eriksen, and A. Boisen, Ultramicroscopy 97, 371 (2003).
4. R. Raiteri, M. Grattarola, H. J. Butt, and P. Skládal, Sens. Actuators B 79, 115 (2001).
5. S. Granick, S. K. Kumar, E. J. Amis, M. Antonietti, A. C. Balazs, A. K. Chakraborty, G. S. Grest, C. Hawker, P. Janmey, E. J. Kramer, R. Nuzzo, T. P. Russell, and C. R. Safinya, J. Polym. Sci., Part B: Polym. Phys. 41, 2755 (2003).
6. I. Luzinov, S. Minko, and V. V. Tsukruk, Prog. Polym. Sci. 29, 635 (2004).
7. A. W. Adamson, Physical Chemistry of Surfaces (Wiley, New York, 1990).
8. H. P. Lang, R. Berger, C. Andreoli, J. Brugger, M. Despont, P. Vettiger, Ch. Gerber, J. K. Gimzewski, J. P. Ramseyer, E. Meyer, and H.-J. Güntherodt, Appl. Phys. Lett. 72, 383 (1998).
9. M. K. Baller, H. P. Lang, J. Fritz, Ch. Gerber, J. K. Gimzewski, U. Drechsler, H. Rothuizen, M. Despont, P. Vettiger, F. M. Battiston, J. P. Ramseyer, P. Fornaro, E. Meyer, and H.-J. Güntherodt, Ultramicroscopy 82, 1 (2000).
10. T. A. Betts, C. A. Tipple, M. J. Sepaniak, and P. G. Datskos, Anal. Chim. Acta 422, 89 (2000).
11. G.-G. Bumbu, G. Kircher, M. Wolkenhauer, R. Berger, and J. S. Gutmann, Macromol. Chem. Phys. 205, 1713 (2004).
12. A. Bietsch, J. Zhang, M. Hegner, H. P. Lang, and Ch. Gerber, Nanotechnology 15, 873 (2004).
13. W. C. Young and R. G. Budynas, Roark's Formulas for Stress and Strain, 7th ed. (McGraw-Hill International Edition, New York, 2002).
14. G. Y. Chen, R. J. Warmack, T. Thundat, D. P. Allison, and A. Huang, Rev. Sci. Instrum. 65, 2532 (1994).
15. J. J. Wortman and R. A. Evans, J. Appl. Phys. 36, 153 (1965).
16. S. P. Timoshenko, J. Opt. Soc. Am. 11, 233 (1925).
17. J. Brandrup and E. H. Immergut, Polymer Handbook, 3rd ed. (John Wiley, New York, 1989).
18. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
19. F. J. von Preissig, J. Appl. Phys. 66, 4262 (1989).
20. R. Shuttleworth, Proc. Phys. Soc., London, Sect. A 63, 444 (1950).
21. S. K. Milonjic, Colloids Surf., A 149, 461 (1999).
22. S. Wu, J. Phys. Chem. 74, 632 (1970).
23. L. A. Girifalco and R. J. Good, J. Phys. Chem. 61, 904 (1957).
24. http://www.msel.nist.gov/structure/polymers/techactv95/ultraelcpk.html