A contribution to the evaluation of scanning electron microscope resolution

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3332, Issue , 1998, Pages 71-80

  Maulny, Aude ^a   Fanget, Gilles L ^a  

^a UNIVERSITÉ LYON 1   (France)

Author keywords

Microporous Silicon; Resolution; Scanning Electron Microscope (SEM); Transfer function; Two Dimensions Fast Fourier Transform (2D FFT)

Indexed keywords

ELECTRON BEAMS; FOURIER TRANSFORMS; IMAGE ANALYSIS; MICROPOROUS MATERIALS; OPTICAL RESOLVING POWER; OPTICAL TRANSFER FUNCTION; SILICON;

TWO DIMENSIONS FAST FOURIER TRANSFORMS (2D FFT);

SCANNING ELECTRON MICROSCOPY;

EID: 0032402795     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308779     Document Type: Conference Paper

References (11)

1. Fourier transform feedback tool for scanning electron microscopes used in semiconductor metrology
2. Survey of scanning electron microscopes using quantitative resolution evaluation
3. A statistical measure for the sharpness of the SEM images
4. Fast fourier transform techniques for measuring SEM resolution
5. High resolution SEM study of porous silicon
6. Porous silicon a new material for MEMS
7. Processing independent photoluminescence response of chemically etched porous silicon
8. Super-resolved surface reconstruction from multiple images
9. New approach in scanning electron microscope resolution evaluation