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Volumn 1998-October, Issue , 1998, Pages 263-266
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Efficient 3D 'atomistic' simulation technique for studying of random dopant induced threshold voltage lowering and fluctuations in decanano MOSFETs
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Author keywords
[No Author keywords available]
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Indexed keywords
IONIC CONDUCTION;
MOSFET DEVICES;
POISSON EQUATION;
CURRENT CONTINUITY;
IMPURITY LEVEL;
MOSFETS;
RANDOM DOPANTS;
RANDOM IMPURITIES;
SIMULATION TECHNIQUE;
THRESHOLD VOLTAGE;
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EID: 33746162765
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/IWCE.1998.742761 Document Type: Conference Paper |
Times cited : (4)
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References (8)
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