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Volumn 128, Issue 2, 2006, Pages 204-215

Nominal and robust feedforward design with time domain constraints applied to a wafer stage

Author keywords

Feedforward control; Laguerre; Linear programming; Motion control; Robust control; Servo systems; Settling time

Indexed keywords

COMPUTATIONAL COMPLEXITY; ELECTROMECHANICAL DEVICES; ITERATIVE METHODS; LINEAR PROGRAMMING; PARAMETRIC DEVICES; SERVOMECHANISMS; SIGNAL PROCESSING; UNCERTAIN SYSTEMS;

EID: 33746121605     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2192821     Document Type: Article
Times cited : (20)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.