Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1163-1166

  Yuuki, Shinya ^a   Sasaki, Minoru ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Low voltage driving; Tensile stress; Tension; Thin film torsion bar

Indexed keywords

LOW-VOLTAGE DRIVING; MICROMIRROR; THIN FILM TORSION BAR; TORSION BAR;

ELECTRIC POTENTIAL; MIRRORS; ROTATION; TENSILE TESTING; THICK FILMS; TORSIONAL STRESS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544452654     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497284     Document Type: Conference Paper

References (3)

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3. M. Sasaki, D. Briand, W. Noell, N. de Rooij, K. Hane, "Three-dimensional SOI-MEMS Constructed by Buckled Bridges and Vertical Comb Drive Actuator", IEEE J. Selected Topics in Quantum Electronics, 10, 455-461 (2004).