The control of membrane thickness in PECVD process utilizing a rule extraction technique of neural networks

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 3973 LNCS, Issue , 2006, Pages 1091-1098

  Chang, Ming ^a   Chen, Jen Cheng ^a   Heh, Jia Sheng ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BOOLEAN ALGEBRA; EXPERT SYSTEMS; KNOWLEDGE BASED SYSTEMS; LOGIC PROGRAMMING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILM TRANSISTORS;

ALARM DIAGNOSIS; MEMBRANE THICKNESS PREDICTION; TFT-ARRAY;

NEURAL NETWORKS;

EID: 33745953595     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/11760191_159     Document Type: Conference Paper

References (12)

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