Advanced process control expert system of CVD membrane thickness based on neural network

Materials Science Forum

Volumn 505-507, Issue PART 1, 2006, Pages 313-318

  Chang, Ming ^a   Chen, Jen G ^a   Chang, Jui Wen ^a   Heh, Jia Sheng ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

APC; CVD; Expert system; Membrane thickness; Neural network

Indexed keywords

EXPERT SYSTEMS; NEURAL NETWORKS; NONLINEAR SYSTEMS; ONLINE SYSTEMS; PROCESS CONTROL; REAL TIME SYSTEMS; THIN FILMS;

MEMBRANE THICKNESS; ON LINE RECIPE ADJUSTMENT; PROCESS PARAMETERS; THIN FILM DEPOSITION;

CHEMICAL VAPOR DEPOSITION;

EID: 33745952587     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-990-3.313     Document Type: Conference Paper

References (14)

1. F. Jansen: AVS Short Course:PECVD (American Vacuum Society, 1990).
2. S. Haykin: Neural Netwroks (Prentice Hall International, New Jersey 1999).
3. J.A. Freeman and D.M. Skapura: Neural Networks (Addison-Wesley, New York 1992).
4. A.S. d'Avila Garcez, K. Broda and D.M. Gabbay: Artificial Intelligence Vol.125 (2001), p. 155.
5. B. G. Buchnan and E. H. Shortliffe: Rule-based expert systems (Addison-Wesley, New York 1984).
6. R. Setiono: Neural Computation Vol.9 (1997), p. 205.
7. G.G. Towell and J. W. Shavlik: Machine Learning Vol. 13 (1993), p. 71.
8. M. Negnevitsky: Artificial Intelligence (Addison-Wesley, New York 2002).
9. S. Russell and P. Norvig: Artificial Intelligence (Prentice Hall, New Jersey 1995).
10. P. Jackson: Introduction to Expert Systems (Addison-Wesley, New York 1999).
11. L.M. Fu: IEEE transactions on System, Man, and Cybernetics Vol. 28 (1994), p. 1114.
12. L.Y. Pratt, J. Mostow and C.A. Kamm: Proceeding of the Ninth National Conference on Artificial Intelligence, CA:AAAI Press, Anaheim, (1991), p. 584.
13. J.C. Chen, J.S. Heh and C.K. Hsu: submitted to Neural Network (2005).
14. R. Andrews, J. Diederich and A.B. Tickle: Knowledge Base Systems Vol.8 (1995), p. 373.