Mechanical characterization of thin film materials with nanoindentation measurements and FE analysis

Journal of Composite Materials

Volumn 40, Issue 15, 2006, Pages 1393-1407

  Huang, Xiaoqin ^a   Pelegri, Assimina A ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Berkovich; Finite elements; Mechanical properties; Nanoindentation; Thermally oxidized silicon; Thin film

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; NUMERICAL METHODS; SILICON; SUBSTRATES;

BERKOVICH; FINITE ELEMENTS; NANOINDENTATION; THERMALLY OXIDIZED SILICON;

THIN FILMS;

EID: 33745941007     PISSN: 00219983     EISSN: 1530793X     Source Type: Journal    
DOI: 10.1177/0021998305059728     Document Type: Article

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