Loading rate effect on lateral force measurements on nanostructured Ti and TiN thin films

Surface and Coatings Technology

Volumn 201, Issue 1-2, 2006, Pages 113-119

  Labdi, S ^a   Jellad, A ^a   Maciejak, O ^a  

^a UNIVERSITÉ D EVRY VAL D ESSONNE   (France)

Author keywords

Mechanical properties; Nanotribology; Thin films

Indexed keywords

ELASTIC MODULI; HARDNESS; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; SILICON; THIN FILMS; TITANIUM; TITANIUM NITRIDE;

LATERAL FORCE MEASUREMENTS; LOADING RATE EFFECT; NANOTRIBOLOGY;

TRIBOLOGY;

ELASTIC MODULI; HARDNESS; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; SILICON; THIN FILMS; TITANIUM; TITANIUM NITRIDE; TRIBOLOGY;

EID: 33745938924     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.047     Document Type: Article

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