Nanoindentation combined with scanning force microscope for characterization of mechanical properties of carbon nitride thin films

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 537-544

  Chowdhury, S ^a   Laugier, M T ^a   Rahman, I Z ^a   Serantoni, M ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

Carbon nitride; Nanoindentation; Scanning force microscope; Sputtering

Indexed keywords

CARBON NITRIDE; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; SILICON; SUBSTRATES;

NANOINDENTATION; SCANNING FORCE MICROSCOPE (SFM);

THIN FILMS;

CARBON NITRIDE;

EID: 1342331918     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00924-1     Document Type: Article

References (12)

1. Ahn J. Kwon D. Mater. Sci. Eng. A 285 2000 172
2. Saha R. Nix W.D. Acta Mater. 50 2002 23
3. Oliver W.C. Pharr G.M. J. Mater. Res. 7 1992 1562
4. De Fazio L. Syngellakis S. Wood R.J.K. Fugiuele F.M. Sciumé G. Diamond Relat. Mater. 10 2001 765
5. Randall N.X. Julia-Schmutz C. Soro J.m. Surf. Coat. Technol. 108-109 1998 489
6. Petzold M. Landgraf J. Futing M. Olaf J.M. Thin Solid Films 264 1995 153
7. Harvey S. Huang H. Venkataraman S. Gerberich W.W. J. Mater. Res. 8 1993 1291
8. Ma Q. Clarke D.R. J. Mater. Res. 10 1995 853
9. Korsunsky A.M. McGurk M.R. Bull S.J. Page T.F. Surf. Coat. Technol. 99 1998 171
10. Xu Z.-H. Rowcliffe D. Surf. Coat. Technol. 161 2002 44
11. Pharr G.M. Oliver W.C. Harding D.S. J. Mater. Res. 6 1991 1129
12. Pharr G.M. Mater. Sci. Eng. A 253 1998 151