Intrinsic properties of (100)/(001)-oriented epitaxial PZT thin films grown on (100)SI and (100)SrTiO3 substrates

Integrated Ferroelectrics

Volumn 78, Issue 1, 2006, Pages 223-232

  Kim, Yong Kwan ^a   Morioka, Hitoshi ^a,b   Okamoto, Shoji ^a   Yokoyama, Shintaro ^a   Funakubo, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Elpida Memory Inc   (Japan)

Author keywords

Electrical properties; Epitaxial film; MOVCD; Pb(Zr,Ti)O3

Indexed keywords

EPITAXIAL GROWTH; IRON COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR ORIENTATION; PERMITTIVITY; SUBSTRATES; VOLUME FRACTION;

EPITAXIAL FILMS; FERROELECTRIC FILMS; REMANENT POLARIZATION;

THIN FILMS;

EID: 33745865939     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600660496     Document Type: Article

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