HRTEM investigation of the 90° domain structure and ferroelectric properties of multi-layered PZT thin films

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 708-712

  Kiguchi, Takanori ^a   Wakiya, Naoki ^a   Shinozaki, Kazuo ^a   Mizutani, Nobuyasu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

90 domain; Ferroelectric properties; HRTEM; PZT; Si; SrTiO3; Thin film

Indexed keywords

FERROELECTRIC MATERIALS; GRAIN SIZE AND SHAPE; HYSTERESIS; POLARIMETERS; SILICON; SUBSTRATES; THERMAL EXPANSION; TRANSMISSION ELECTRON MICROSCOPY;

DOMAIN STRUCTURES;

FERROELECTRIC THIN FILMS;

EID: 0344490389     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00988-7     Document Type: Conference Paper

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