Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 397-402

  Kano, Kazuhiko ^a   Arakawa, Kazuki ^a   Takeuchi, Yukihiro ^a   Akiyama, Morito ^b   Ueno, Naohiro ^b   Kawahara, Nobuaki ^a  

^a DENSO CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AlN; Aluminum nitride; d33; Piezoelectric coefficient; Piezoelectric uni morph actuator; Scanning laser Doppler vibrometer

Indexed keywords

DOPPLER EFFECT; PIEZOELECTRIC DEVICES; SILICA; SILICON; THERMAL EFFECTS;

ALN; ALUMINUM NITRIDES; D33; PIEZOELECTRIC COEFFICIENT; SCANNING LASER DOPPLER VIBROMETERS;

ALUMINUM;

EID: 33745854424     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.047     Document Type: Article

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