Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 189-192

  Giangrandi, S ^a,b   Brijs, B ^a   Sajavaara, T ^c   Bender, H ^a   Iacopi, F ^a   Vantomme, A ^d   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c UNIVERSITY OF JYVÄSKYLÄ   (Finland)

^d KU LEUVEN   (Belgium)

Author keywords

Elastic recoil detection; Elemental loss; FTIR; Irradiation damage; Low k materials

Indexed keywords

DIELECTRIC MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAVY IONS; ION BEAMS; IRRADIATION; THIN FILMS;

ELASTIC RECOIL DETECTION; ELEMENTAL LOSSES; IRRADIATION DAMAGE; LOW-K MATERIALS; ORGANOSILICATE; SEMICONDUCTOR TECHNOLOGY;

POROUS MATERIALS;

EID: 33745841568     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.111     Document Type: Article

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