Characterization of high and low k dielectrica using low-energy Time of Flight Elastic Recoil Detection

Microelectronic Engineering

Volumn 80, Issue SUPPL., 2005, Pages 106-109

  Brijs, B ^a   Sajavaara, T ^a,b   Giangrandi, S ^a,b   Arstila, K ^c   Vantomme, A ^b   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c UNIVERSITY OF HELSINKI   (Finland)

Author keywords

ERDA; High k; Low k; RBS

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC FILMS; HEAVY IONS; ION BEAMS; KINEMATICS; PARTICLE ACCELERATORS; PERMITTIVITY; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); HIGH Κ; LOW Κ; RBS;

ULTRATHIN FILMS;

EID: 19944387646     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.04.051     Document Type: Conference Paper

References (2)

1. J. L'Ecuyer J. Appl. Phys. 47 1997 881
2. th International Conference on the Application of Accelerators in Research and Industry, J. L. Duggan and I. L. Morgan (eds.), American Institute of Physics. Conference Proceedings 475, p. 541 (1999)