Optimal segmentation of polygon edges

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6156, Issue , 2006, Pages

  Sezginer, Apo ^a   Yenikaya, Bayram ^a   Huang, Hsu Ting ^a   Kamat, Vishnu ^a   Chen, Yung Tin ^b  

^a Invarium Inc   (United States)

^b SanDisk Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MODEL-BASED SEGMENTATION ALGORITHMS; OPTICAL PROXIMITY CORRECTION; OPTIMAL SEGMENTATION; POLYGON EDGES;

ALGORITHMS; EDGE DETECTION; ERROR CORRECTION; HEURISTIC METHODS; IMAGE SEGMENTATION; MATHEMATICAL MODELS; OPTICAL ENGINEERING; PROXIMITY INDICATORS;

OPTIMAL SYSTEMS;

EID: 33745782953     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656695     Document Type: Conference Paper

References (5)

1. Shih-Ying Chen and Eric Lynn, "Flexible fragmentation rules for next-generation OPC: tag prior to fragmentation," Proc. SPIE Vol 4691, p. 1221-1231, July 2002.
2. Nick Cobb and Yuri Granik, "New concepts in OPC," Proc. SPIE Vol 5377, p. 680-690
3. Optical Microlithography, p. 680-690, May 2004.
4. Mukherjee at al., "Method for adaptive segment refinement in optical proximity correction," United States Patent Application Publication, US 2005/0055658 A1. March 10, 2005.
5. Melvin, Lawrence S., "Method and apparatus for generating an OPC segmentation based on modeled intensity gradients," United States Patent Application Publication, US 2005/0081179 A1, April 14, 2005.