Recent advances and prospects of precise 3D microfabrication with a high aspect ratio

IEEJ Transactions on Sensors and Micromachines

Volumn 126, Issue 6, 2006, Pages 211-215

  Hattori, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

3D microfabrication; Diffraction grating; Electroforming; LIGA process; MEMS

Indexed keywords

3D MICROFABRICATION; HIGH ASPECT RATIO; LIGA PROCESS; MEMS;

DIFFRACTION GRATINGS; ELECTROFORMING; SYNCHROTRON RADIATION;

MICROSTRUCTURE;

EID: 33745673125     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.126.211     Document Type: Article

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