An approach to three-dimensional microstructure fabrication utilizing hard x-ray lithography of synchrotron radiation

Review of Scientific Instruments

Volumn 73, Issue 3 II, 2002, Pages 1376-

  Hattori, Tadashi ^a   Mekaru, Harutaka ^a   Utsumi, Yuichi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

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Indexed keywords

EID: 0036494559     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1447583     Document Type: Conference Paper

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