A novel switchable BARC (SBARC) and process to improve pattern collapse and defect control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6153 I, Issue , 2006, Pages

  Chang, Ching Yu ^a   Yu, D C ^a   Chen, J H ^a   Lin, John C H ^a   Lin, Burn J ^a   Thackeray, James W ^b   Vohra, Vaishali ^b   Wayton, Gerald ^b   Kurihara, Tomoki ^b  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

^b ROHM AND HAAS COMPANY   (United States)

Author keywords

BARC; Cleaving group; Hydrophilic; Hydrophobic; Switchable; Van der waal force

Indexed keywords

ADHESIVES; CONTACT ANGLE; HYDROPHILICITY; HYDROPHOBICITY; INTERFACIAL ENERGY; REFLECTION; SATELLITES; VAN DER WAALS FORCES; WATERMARKING;

BARC; CLEAVING GROUP; SATELLITE-TYPE DEFECTS; SWITCHABLE;

DEFECTS;

EID: 33745620217     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658416     Document Type: Conference Paper

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