Investigation of BARC-resist interfacial interactions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 II, Issue , 2003, Pages 912-922

  Devadoss, Chelladurai ^a   Wang, Yubao ^a   Puligadda, Rama ^a   Lenhart, Joseph L ^b   Jablonski, Erin L ^c   Fischer, Daniel A ^c   Sambasivan, Sharadha ^c   Lin, Eric K ^c   Wu, Wen Li ^c  

^a BREWER SCIENCE INC   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

BARC; Interfacial interactions; Interphase; NEXAFS; Residual layer; Resist; Surface chemistry

Indexed keywords

ANTIREFLECTION COATINGS; CONTACT ANGLE; INTERFACES (MATERIALS); SURFACE CHEMISTRY;

BOTTOM ANTIREFLECTIVE COATING; INTERFACIAL INTERACTIONS; NEAR EDGE X RAY ABSORPTION FINE STRUCTURE SPECTROSCOPY;

PHOTOLITHOGRAPHY;

EID: 0141833597     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485347     Document Type: Conference Paper

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