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Volumn 6152 I, Issue , 2006, Pages
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Comprehensive approach to MuGFET metrology
a a a a a a a a a a a a a a b b c c c |
Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
GATES (TRANSISTOR);
METRIC SYSTEM;
SCATTERING;
SURFACE ROUGHNESS;
LINE WIDTH ROUGHNESS (LWR);
MOORE'S LAW;
MULTI-GATE FIELD-EFFECT TRANSISTOR (MUGFET);
OPTICAL PROXIMITY CORRECTION (OPC);
FIELD EFFECT TRANSISTORS;
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EID: 33745585303
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.656076 Document Type: Conference Paper |
Times cited : (6)
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References (3)
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