Tunable hydrophilicity on a hydrophobic fluorocarbon polymer coating on silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1005-1011

  Kolari, K ^a   Hokkanen, A ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FLUOROCARBONS; HYDROPHILICITY; OPTIMIZATION; PHOTOLITHOGRAPHY; PLASMA ETCHING; POLYMERS;

HYDROPHILIC APERTURES; HYDROPHOBIC FLUOROCARBON POLYMERS; HYDROPHOBIC SURFACES;

SEMICONDUCTING SILICON;

EID: 33745488673     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2207149     Document Type: Article

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