Effects of ion assistance and substrate temperature on optical characteristics and microstructure of MgF2 films formed by electron-beam evaporation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 A, 2006, Pages 5027-5029

  Jaing, Cheng Chung ^a   Shiao, Ming Hua ^b   Lee, Cheng Chung ^c   Lu, Chih Jung ^d   Liu, Ming Chung ^c   Lee, Chin Han ^c   Chen, Hsi Chao ^c  

^a MINGHSIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^d NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Crystallinity; Fluorine deficiency; Ion assisted deposition; MgF2; Microstructure; Optical loss; Optical property; Substrate temperature; Surface roughness

Indexed keywords

CRYSTALLIZATION; ION BEAM ASSISTED DEPOSITION; MICROSTRUCTURE; OPTICAL PROPERTIES; SURFACE ROUGHNESS; TEMPERATURE DISTRIBUTION;

CRYSTALLINITY; FLUORINE DEFICIENCY; ION-ASSISTED DEPOSITION; MGF2; OPTICAL LOSS; SUBSTRATE TEMPERATURE;

MAGNESIUM COMPOUNDS;

EID: 33745269573     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5027     Document Type: Article

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