A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1742-1745

  Tong, H D ^a   Gielens, F C ^b   Hoang, H T ^a   Berenschot, J W ^a   De Boer, M J ^a   Gardeniers, J G E ^a   Jansen, H V ^a   Nijdam, W ^a   Van Rijn, C J M ^c   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c AQUAMARIJN MICRO FILTRATION B V   (Netherlands)

Author keywords

Bars; Biomembranes; Fluid flow measurement; Hydrogen; Micromachining; Permeability; Robustness; Temperature; Testing; Transistors

Indexed keywords

ACTUATORS; BARS (METAL); COMPOSITE MICROMECHANICS; FLOW OF FLUIDS; HYDROGEN; MECHANICAL PERMEABILITY; MEMBRANES; MICROFABRICATION; MICROMACHINING; MICROSYSTEMS; ROBUSTNESS (CONTROL SYSTEMS); SILVER; SILVER ALLOYS; TEMPERATURE; TESTING; TRANSDUCERS; TRANSISTORS;

BIOMEMBRANES; HIGH MECHANICAL STRENGTH; HYDROGEN PERMEABILITY; HYDROGEN SELECTIVITY; HYDROGEN SEPARATION; MICROFABRICATION PROCESS; MICROMACHINING TECHNIQUES; PALLADIUM-SILVER ALLOY;

SOLID-STATE SENSORS;

EID: 33745225512     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217122     Document Type: Conference Paper

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